The NSW Node (ANFF-NSW) offers advanced nanofabrication capability in cleanrooms and laboratory spaces. It is based at the University of New South Wales, operating within a 600m2 laboratory complex providing cleanrooms with particle counts equivalent to ISO5, ISO6 and ISO7.
The core area of expertise for ANFF-NSW is nanoelectronics, with both Si-MOS and GaAs devices with sub-50nm feature sizes routinely produced using the Node’s suite of high resolution EBL systems. The full range of research disciplines regularly supported by ANFF-NSW is broad, encompassing quantum computing, biomedical devices, nanophotonics, medical detectors and photovoltaics. ANFF-NSW also has a strong process engineering team available to develop and deliver one-on-one nanofabrication training programs to suit researchers’ needs, and to perform process development work on behalf of researchers.
Around 250 researchers make use of the ANFF-NSW laboratories each year, representing a diverse range of research disciplines including electronics, quantum technologies, photonics, clean energy technologies, biomedical devices and medical sensor technologies.
Specialist fields:
- Nanoelectronics
- High resolution electron-beam lithography
- Nanoelectronics (Si MOS and GaAs)
- Semiconductor device processing.
Flagship facilities:
- Three high resolution EBL systems, including the flagship Raith 150TWO
- UV lithography equipment
- A range of deposition systems and etching tools
- High temperature silicon oxidation, diffusion and annealing furnaces
- Wet chemical process lines
- A suite of metrology tools
- Device packaging and bonding tools.